Multiple critical dimensions need to be measured on MEMS components, including curved pitch, width and spacing, connectors, comb-like elements, arcs, circle diameters, and center positions. Due to the high demand and wide applicability of MEMS technology and components, dimensions vary from a few micrometers to several millimeters. Constraints related to product size necessitate image magnification for high-precision inspection.

Furthermore, the core of a MEMS device involves moving components. A MEMS device must either enable internal components to move or allow a component to move in response to external influences and then sense that movement. The moving parts of MEMS devices are typically implemented through flexures, and motion detection often involves sets of interleaved "fingers" or "comb teeth." For precise motion and motion detection, understanding the dimensions of the flexures and dynamic detection elements is crucial.

The QVI series image measuring instruments feature a stable and precise motion system, ensuring the accurate measurements required for MEMS components.