A variety of key dimensions need to be measured on MEMS components, including curved pitch, width and pitch, connectors, comb-like components, arcs, circular diameters, and center positions. Due to the large demand and wide range of MEMS technology and components, the sizes range from a few microns to a few millimeters. The reason of product size limitation needs image magnification for high precision detection.

In addition, the core of the MEMS device is to contain moving components. MEMS must either move a component inside it, or allow a component to move in response to external influences, and then sense that movement. The moving parts of MEMS devices are usually bent and detected, usually involving several groups of interlaced“Tentacles” or“Combs”. For accurate motion and motion detection, it is essential to understand the dimensions of bending and dynamic detection elements.

QVI series image measuring instruments have a smooth and accurate measuring motion system, which can ensure the accurate measurement required by MEMS components.